- Drying
- Rinse/clean
- Etching
- Manual coating
- Automatic coating
- Developing
Spin Process Station:스핀프로세스 스테이션 (클리닝&드라잉) Spin Cleaning & Spin Drying
클리닝 (CLEANING)
고압 및 초음파세척용 스핀 프로세서 :스핀클리닝, 스핀 드라잉: High Pressure and Megasonic Cleaning Spin processor for spin cleaning and drying
- Full 플래스틱 하우징 :NPP
- Linear movable arm for direct spray among all substrate surface :High Pressure and Megasonic jets.
- Integrated High Presure Scrubber Jet : up to 200 Bar
- Interchangeable high pressure spray tips feature feathered spray pattern edges to deliver a uniform coverage
- Megasonic cleaner spot shower : flow and power 조정가능
- 핫 DI-Water 린싱 시스템(with 3.5kW PFA coated Bath Heating System) suitable for high-purity fluids.
- Substrate Front & Back Side In Situ Di Water Rinse
- Integrated CO2 bubbler
- Nitrogen dry : through dome or movable arm
- 시료 사이즈: up to Ø 300 mm
- 이지 프로세스 콘트롤 :Closed chamber with Transparent Lid
- 이지 프로그래머블 step-by-step 메모리설정 , 조정가능 항목:
- Hi-pressure pump activation
- Megasonic activation and adjustable output intensity level per step
- Hot DIW rinse activation (Temperature settable per recipe)
- Time : 1-999 sec/step
- Speed :1-10.000 rpm
- Acceleration / Deceleration : 1-30.000 rpm/sec
Also Available with MMLO (Megasonic Metal Lift Off). Please click this link for a video
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