스핀에칭:Spin Etching

요구사항:

  • Spin Process Station

추천모델:

* These unit are suitable for Puddle Etch processes, speedrates can be set from 1 up to 7.000 rpm, chuck turning can be programmed to rotate alternating between clockwise and counter clockwise.

CHECK CHEMICAL COMPATIBILITY OF YOUR PROCESS WITH THE NPP OR PTFE BOWL-MATERIAL.

  • Drying
  • Rinse/clean
  • Etching
  • Manual coating
  • Automatic coating
  • Developing

재성ITS co.      Tel:031-479-4211/2   Fax:031-479-4213
jsi@jsits.com
안양시 동안구 호계동 555-9 국제유통상가,17동 127호