요구사항:

• Choice of Vacuum or Non-Vacuum Chuck
• Manual (MCD) or Automatic Chemical Dispense (ACD)

옵션:

• Back-Side Rinse
  (only with mechanical chucks)

추천모델:

Manual / Automatic Dispense

• Up to 150mm: POLOS SPIN150i-NPP* / POLOS ACD200-NPP*
• Up to 200mm: POLOS SPIN200i-NPP* / ACD200-NPP*
• Up to 300mm: POLOS MCD300-NPP* / ACD300-NPP*

 

CHECK CHEMICAL COMPATIBILITY OF YOUR PROCESS WITH THE NPP OR PTFE BOWL-MATERIAL.

PICTURE:

acd 200