BSR Back Side Rinse for Spincoater

Backside spray nozzle with adjustable position for rinsing of chuck side of substrate, including standard nozzle.

BSR
 
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  • Drying
  • Rinse/clean
  • Etching
  • Manual coating
  • Automatic coating
  • Developing

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jsi@jsits.com
안양시 동안구 호계동 555-9 국제유통상가,17동 127호