미래형 고성능 스핀코터?
고성능 , 다기능, 고정밀, 고신뢰성 스핀코터.

모든작업 을 콘트롤 가능한 터치스크린 패널

manufactured in Germany.

Clear view of your process

Polos 스핀커터는 R&D 용으로 특별히 설계된 스핀코터 입니다. 4" 프로그램용 디스플레이에서 여러작업을 콘트롤 가능합니다. MEMS, Semi-may require mask cleaning, or a coating step conductor, PV, Microfluidics field, 등등 POLOS 싱글 웨이퍼 스핀코터는수많은 응용작업이 가능합니다. cleaning, rinse/dry, coating, developing and etching. 4인치 터치스크린 콘트롤 디스플레이 USB 소켓 장착 unlimited메모리 및 스텝 기능 독일제 디지털 서보모터 장착으로 최고의 정밀도 및 신뢰성 요하는 작업 가능. α-crystalline NPP-H 사용으로 일반 NPP보다 100C에서 2배이상의 강도 및 내구성 ,내충격성보유.
스핀코터 특징: 고속 가속 기능 :up to 0 - 12,000rpm in 0.3 sec. between speed and acceleration Without line break 최대 가속도 :30,000rpm/sec 분리 가능한 터치스크린 콘트롤 패널 - 글로브박스 (glove box)내 설치시 유리. 회전 및 역회전 기능:“puddle” develop and/or etch. Full-Engineering Plastics only, high quality seamless fabrication. 세이프티 록 장착. N2 퍼지포트 장착 :Syringe Holder & Diffuser for N₂ 외부 관찰 가능한 강화 Glass cover장착 : depending on substrate size and chuck type

Polos 스핀커터는 R&D 용으로 특별히 설계된 스핀코터 입니다.

4" 프로그램용 디스플레이에서 여러작업을 콘트롤 가능합니다. MEMS, Semi-may require mask cleaning, or a coating step conductor, PV, Microfluidics field, 등등

POLOS 싱글 웨이퍼 스핀코터는수많은 응용작업이 가능합니다.

cleaning, rinse/dry, coating, developing and etching.

4인치 터치스크린 콘트롤 디스플레이

USB 소켓 장착

unlimited메모리 및 스텝 기능

독일제 디지털 서보모터 장착으로 최고의 정밀도 및 신뢰성 요하는 작업 가능.

α-crystalline NPP-H 사용으로 일반 NPP보다 100C에서 2배이상의 강도 및 내구성 ,내충격성보유.

스핀코터 특징:

고속 가속 기능 :up to 0 - 12,000rpm in 0.3 sec. between speed and acceleration Without line break

최대 가속도 :30,000rpm/sec

분리 가능한 터치스크린 콘트롤 패널 - 글로브박스 (glove box)내 설치시 유리.

회전 및 역회전 기능:“puddle” develop and/or etch.

Full-Engineering Plastics only, high quality seamless fabrication.

세이프티 록 장착.

N2 퍼지포트 장착 :Syringe Holder & Diffuser for N₂

외부 관찰 가능한 강화 Glass cover장착 :

depending on substrate size and chuck type

Benefits

Where the application requires PTFE, we use TFM1600 material, superior for use with chemicals above standard PTFE, with a much higher material surface density than standard PTFE,

thus significantly lower “Memory Capability” for absorbing contamination from Chemicals.

Liners are available in PET (Polyethylenterephthalat), 0.5mm thick, transparent, antistatic (10⁸- 10¹⁰ Ω) to prevent possible build-up of static charge in the chamber.

SPIN150i - SPIN200i 스핀코터

Specifications	SPIN150i	SPIN200i
프로그램수: 스텝: 회전수: 정밀도: 회전방향:	Unlimited Unlimited 0-12,000 rpm +/-1rpm steps ± 0.1 rpm 정회전,역회전 , Puddle	Unlimited Unlimited 0-12,000 rpm +/-1rpm steps ± 0.1 rpm 정회전,역회전 , Puddle
최대 가속도:Ramp up down가능 시간 설정	30,000 rpm/sec Unlimited , ± 0.1 seconds steps	30,000 rpm/sec Unlimited, ± 0.1 seconds steps
Free programmable outputs:	3 pcs, relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC	3 pcs, relays, nominal switching capacity 0,5 A /125 VAC - 0.3A / 60VDC
시스템 본체 재질: 챔버 재질l:	Natural Polypropylene (NPP) Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM)	Natural Polypropylene (NPP) Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM)
Interface: External connection:	Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller	Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller
최대시료 사이즈 : Max. process chamber diameter:	160mm round or 4인치 x 4인치 square	260 mm round or 6인치 x 6인치 square
Dimension (desktop version): Shipping weight: Shipping dimension: Requirements Voltage: Power consumption: Max. current: Vacuum: Motor purge gas: Drain connection:	202 mm 274 (w) x 250 (h) x 451 (d) mm 14 kgs 600 x 380 x 360 mm 100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) Max. 500 W 5A / 2,5A -65 kPa (-19 inchHg), > 80 lpm Tube OD Ø8mm 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm 1” M-NPT	302 mm 380 (w) x 307 (h) x 559 (d) mm 20 kgs 680 x 580 x 480 mm 100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) Max. 500 W 5A / 2,5A -65 kPa (-19 inchHg), > 80 lpm Tube OD Ø8mm 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm 1” M-NPT

Measured without substrate, limitations may apply depending on chuck used and substrate specification

For our spin processors and chucks we use NPP-H with α-crystalline properties..

Options SPIN150i/SPIN200i 스핀코터

POLOS Advanced 200 - 300 - 450 스핀코터

	300mm
Polos Advanced series는 디스펜싱 장치를 추가 하는데 좀더 편리합니다.	Automatic Sequential or Parallel Chemical Dispense Up to 6 spray nozzles Each programmable independently Dispense Vessel (DV), DI Water or N₂

300mm

Polos Advanced series는 디스펜싱 장치를 추가 하는데 좀더 편리합니다.

Automatic Sequential or Parallel Chemical
Dispense Up to 6 spray nozzles Each programmable independently Dispense Vessel (DV), DI Water or N₂

Specifications POLOS Advanced 스핀코터

Specifications	POLOS 200 Advanced 스핀코터	POLOS 300 Advanced 스핀코터
프로그램수: 스텝: 회전수: 정밀도: 회전방향: 최대 가속도:Ramp up down가능 시간 설정	Unlimited Unlimited 1 - 12,000 rpm ± 1rpm steps ± 0.1 rpm Clockwise, Counter clockwise and Puddle 30,000 rpm/sec unlimited	Unlimited Unlimited 1 - 12,000 rpm ± 1rpm steps ± 0.1 rpm Clockwise, Counter clockwise and Puddle 30,000 rpm/sec unlimited
Free programmable outputs:	3 dry relays as standard Up to 16 digital input, 16 digital output, 4 analog input, 4 analog output (with optional IO modules)	3 dry relays as standard Up to 16 digital input, 16 digital output, 4 analog input, 4 analog output (with optional IO modules)
시스템 본체 재질: 챔버 재질l:	Natural Polypropylene (NPP) Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM)	Natural Polypropylene (NPP) Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM)
Interface: External connection:	Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller	Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller
최대시료 사이즈 : Max. process chamber diameter:	260mm round or 6인치 x 6인치 square	360mm round or 8인치 x 8인치 square
Dimension (desktop version):	302 mm 380 (w) x 307 (h) x 599 (d) mm	402 mm 430 (w) x 310 (h) x 650 (d) mm
Shipping weight: Shipping dimension:	20 kgs 680 x 580 x 480 mm	32 kgs 780 (w) x 620 (h) x 580 (d) mm
Requirements Voltage: Power consumption: Max. current: Vacuum: Motor purge gas: Drain connection:	100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) Peak 1800 W 10A / 8A -80 kPa (-24 inchHg), > 80 lpm Tube OD Ø8mm 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm 1” M-NPT	100 - 120 VAC / 200 - 240 VAC 50/60 Hz (auto select) Peak 1800 W 10A / 8A -80 kPa (-24 inchHg), > 80 lpm Tube OD Ø8mm 20 - 50 kPa, 2-5 l/min, Tube OD Ø 6mm 1” M-NPT

Specifications	POLOS 450 Advanced 스핀코터
프로그램수: 스텝: 회전수: 정밀도: 회전방향: 최대 가속도:Ramp up down가능 시간 설정 Free programmable outputs: 시스템 본체 재질: 챔버 재질l: Interface: External connection: 최대시료 사이즈 : Max. process chamber diameter: Dimension (desktop version): Shipping weight: Shipping dimension: Requirements Voltage: Power consumption: Max. current: Vacuum: Motor purge gas: Drain connection:	Unlimited Unlimited 0-1,500 rpm ± 1rpm steps ± 0.1 rpm Clockwise, Counter clockwise and Puddle <1500 rpm/s depends on the load unlimited 3 dry relays, nominal switching capacity 0.5A /125 VAC - 0.3A / 60DC Natural Polypropylene (NPP) Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant 1 USB Port in the controller 460 round and 350x350mm square substrates 502 mm 795 (w) x 638 (h) x 922 (d) mm 75 kgs 800 x 790 x 1180 mm 200 - 240 VAC 50/60 Hz Peak 1000W 10A -80 kPa (-24 inchHg), > 80 lpm. Tube OD Ø 8mm 20 - 50 kPa. Tube OD Ø 6mm 500lph 1,5” M-NPT

Specifications

POLOS 450 Advanced 스핀코터

프로그램수:
스텝:
회전수:
정밀도:
회전방향:
최대 가속도:Ramp up down가능
시간 설정
Free programmable outputs:

시스템 본체 재질:
챔버 재질l:

Interface: External connection:

최대시료 사이즈 :
Max. process chamber diameter:

Dimension (desktop version):
Shipping weight:
Shipping dimension:
Requirements Voltage:
Power consumption:

Max. current: Vacuum:
Motor purge gas:
Drain connection:

Unlimited
Unlimited
0-1,500 rpm ± 1rpm steps
± 0.1 rpm
Clockwise, Counter clockwise and Puddle
<1500 rpm/s depends on the load
unlimited
3 dry relays, nominal switching capacity
0.5A /125 VAC - 0.3A / 60DC

Natural Polypropylene (NPP)
Natural Polypropylene (NPP) or High Chemical Resistant PTFE (TFM) Detachable, full-size touchscreen, glove-friendly, IP52, chemical resistant

1 USB Port in the controller

460 round and 350x350mm square substrates
502 mm

795 (w) x 638 (h) x 922 (d) mm
75 kgs
800 x 790 x 1180 mm
200 - 240 VAC 50/60 Hz
Peak 1000W 10A

-80 kPa (-24 inchHg), > 80 lpm.
Tube OD Ø 8mm 20 - 50 kPa. Tube OD Ø 6mm 500lph
1,5” M-NPT

Considering additional capability of standard unit such as USB backup, recipe cycling, PC software etc.

Measured without substrate, limitations may apply depending on chuck used and substrate specification.

POLOS 200/300/450 Advanced 스핀코터 옵셔널 악세사리


EBR (Edge Bead Removal) Auto Dispense Lines Full PTFE Dispense Vessel Automated injector line	MegPie BSR (Back Side Rinse) The Sapphire MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing.

Static Barrier Plate High Pressure Jet	Corrugated Drainhose, Drain tank andVacuum Pump connector In NPP, including connection to The vacuum pump is very quite and reliable.connect to the drainport.