ultra-clean, metals-free |
EBR 옵션 : Edge Bead Removal,Spincoater
EBR(Edge Bead Removal)이란: wafer 가장자리의 감광막을 제거시켜 particle 발생현상을 제거시켜주는 공정.
Edge bead removal spray nozzle (topside substrate) with adjustable position, including standard nozzle.
 EBR용 Spin200x-EBR |
 Pressure Vessel |
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Top side EBR 장착 EBR 노즐 1ea 장착 노즐을 통한 분사압 ,시간 조절 가능 |
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The EBR injector is fixed in the lid, into the position of the smaller off-centre hole. The stainless steel nozzle is angled for the edge-bead, and then locked in position. A "suckback" valve assembly is fitted on the back of the spin coater, and connected to this nozzle. So the EBR chemical can be supplied through the injector nozzle, with no drips from the nozzle when it shuts off. |
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Back Side Rinse용 Spincoater |
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자세한 사항은 문의 요망