MASKLESS LITHOGRAPHY SYSTEM POLOS μPrinter   Spincoater Main

MASKLESS LITHOGRAPHY SYSTEM POLOS μPrinter

The POLOS μPrinter is a maskless lithography equipment for rapid-prororyping,
(Polos 마스크리스 리소그래피 시스템, 빠른 프로토 타입 제작 가능)

based on a μLCD projection technology,
compatible with a wide range of resists and substrates.

-하드마스크를 제작할 필요없이 캐드도면을 웨이퍼나 글래스에 바로 노광하는 방식

Our system can produce any 2D shapes at micron resolution without the need for a hard-mask.
- 하드 마스크 제작 없이 마이크론 단위의 노광 가능

   

 

Key features

-라이팅 해상도 >2 μm

-Adjustable writing field and resolution with exchangeable objectives

Compatible with CAD files or bitmap images

Compatible with g-line photoresists

Compatible with a wide range of substrates (silicon, glass, metal, plastic, ... )


Compatible with any sample size up to 4” wafer Camera feedback for alignment steps

 

Key benefits

Time and money saving due to the absence of a hard-mask

lntuitive alignment method with direct overlay of the design on the sample

Table-top with very small foot print

Technology well suited for microelectronics, 2D-materials, microfluidics, optoelectronics, opties or any other 2D microfabrication application

MASKLESS LITHOGRAPHY SYSTEM POLOS μPrinter

SPECIFICATIONS

Microfabrication system

Light source

Exposure: 435 nm; alignment: 525 nm

Minimum feature size

Adjustable from 2 to 23 μm

Alignment resolution

Down to 1 μm/cm2

Maximum exposure area

75 x75 mm2

Substrate size

Up to 4” wafers

System dimensions

W: (36 cm); D: (36 cm); H: (60 cm)

Software package

All-in-one PC

With Win 10, 24" full HD

SFTprint software

Machine control, step-and-repeat, automatic dose test, stitching, alignment

SFTconverter

Convertion of standard formats (gdsii, dxf, cif, oas) to bitmap images. CAD software included

Options and accessories Multiple-sample holder (glass-slide, 4” water, ... ) Objectives (see below) Manual or motorized Z stage with tilt correction Manual rotation stage (360°)

Objective

1X

2.5X

5X

10X

Writing field (mm)

13.6 x 7.7

5.4 x 3.0

2.7x 1.5

1.35 x 0.75

Smallest feature (μm)

23

8

4

2

 

재성ITS co. Tel:031-479-4211/2
jsi@jsits.com
안양시 동안구 호계동 555-9 국제유통상가,17동 127호